UltraLO-1800超低本底α計數器用于低阿爾法材料（low Alpha）和極低阿爾法材料（Ultra low Alpha）的檢測，可檢測材料的α輻射率，如半導體、微電子、集成電路等領域的晶圓片、焊接材料、封裝材料、PCB材料等?；谄洫毺氐膬炔拷Y構設計和強大的算法，可以有效的識別和區分α測量中的有效信號和設備本底信號，并在處理數據時將本底信號直接去除，相當于達到等效本底0.0001 alpha/cm2/hr甚至更低，進而極大的縮短測量時間（可在10小時內完成0.001-0.0005 alpha/cm2/hr輻射率材料的檢測；在100小時內完成小于0.0005 alpha/cm2/hr輻射率材料的檢測）。 UltraLO-1800也可用于物理研究中的“罕見事件”測量和環保相關的研究。 |
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Counting system includes:
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Performance category | Specification |
Required counting time for measurement of ULA (0.001) sample1 | (50%) 6 hrs, (25%) 24hrs, (12.5%) 90 hrs -- (measurement accuracy) time |
Required counting time for measurement of LA (0.01) sample1 | (50%) 30 min, (25%) 2.5 hrs, (12.5%) 9 hrs -- (measurement accuracy) time |
Typical counter efficiency | > 90% of 2π |
Energy resolution (230Th source) | < 9% FWHM (at 4.6 MeV) |
Energy sensitivity range | 1-10 MeV |
Sample sizes (typical min - max) | 300mm wafer (707cm2) - 1800cm2 |
1 – Sample assumed to be 300mm wafer (count times drop by factor of 2.5 when using max sample area)
| Highlighted Features Robust Data Management: Easily access and review both current and historical measurement data. Data Export: Generate and save datasets in convenient ASCII format. Report Generation: Measurement results saved to PDF reports. System Health Information: Monitor system noise levels, gas flow rate, operating bias and more. |
Requirements | Specification |
Minimum sample size (typical) | 300mm wafer (707cm2) |
Maximum sample size | 1800cm2 |
Maximum sample weight | 20 lbs (9 kg) |
Maximum sample thickness | 0.25 in (6.3 mm) |
Counting Gas | Argon |
Gas pressure | 21psi (150kPa) ±5% |
Line Voltage | 100-240 (VAC) 50/60 Hz |
Power Consumption (Instrument) | 50 W (100 W maximum) |
Power Consumption (Laptop) | 30 W |
System dimensions (L x W x H) | 65 in x 35 in x 27 in (165 cm x 89 cm x 69 cm) |
Weight | 360 lb (163 kg) |